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Device for synthesis of graphene, CVD Equipment Corporation

An advanced Chemical Vapour Deposition process development tool controlled by proprietary real-time process control software that provides recipe driven process control, real-time graphing and automatic data logging for optimal process reproducibilit

Device for synthesis of graphene, CVD Equipment Corporation

Contacts and Location

Contact 1 jana Andžāne
Enquire about this equipment
Organisational Unit Institute of Chemical Physics
    University of Latvia

Description

An advanced Chemical Vapour Deposition process development tool controlled by proprietary real-time process control software that provides recipe driven process control, real-time graphing and automatic data logging for optimal process reproducibility

Specification

  • CVD synthesis of monolayer and multilayer graphene on copper and nickel substrates (max substrate size 2.5cmx5cm)
  • 3-zone resistance furnace for temperatures up to 1100oC,
  • Low (75 Torr) and atmospheric pressure operation,
  • Cantilevered automatic substrate loading/unloading system,
  • Vacuum monitoring system,
  • 4 mass flow controlled UHP gas lines

Services

Monolayer and multilayer graphene synthesis on copper and nickel substrates (max size of a substrate 2.5cmx5cm. At the moment the recipe is developed only for synthesis of monolayer graphene on copper substrates.

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