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Energy Dispersive X-Ray Spectrometer

The electrons interact with atoms in the sample, producing various signals (secondary electrons, backscattered electrons, X-rays), that can be detected and that contain information about the sample's surface topography and composition.

Energy Dispersive X-Ray Spectrometer

Contacts and Location

Description

The electrons interact with atoms in the sample, producing various signals (secondary electrons, backscattered electrons, X-rays), that can be detected and that contain information about the sample's surface topography and composition.

Specification

EDX spectrometer (to identify the qualitative and quantitative composition of the specimen surface):

  • Si(Li) LN2 detector
  • 10mm2 INCA SATW window
  • Detection from Be to Pu
  • Detector resolution guaranteed at 2,500cps provides reliable and accurate results over entire spectral range at typical microscope operating conditions: at C Kα 66eV or better, at F Kα 70eV or better, at Mn Kα 133eV or better
  • Stability guaranteed from 1,000 to 100,000 cps – peak shift and resolution change <1 eV
  • Reliable AutoID for element Identification
  • Interaction area ≥1mkm
  • Sensitivity of 1 Wt% for light elements and 0.1 Wt % for heavier elements

Electron optics working modes

  • High vacuum mode: Resolution, Depth, Field, Wide Field, Rocking Beam
  • Low vacuum mode: Resolution, Depth
  • Magnification: 4x to 1,000,000x in Continual Wide Field / Resolution Mode
  • Accelerating voltage: 500 V to 30 kV
  • Electron gun: High brightness Schottky emitter
  • Probe current: 2 pA to 20 nA
  • Scanning speed: From 200 ns to 10 ms per pixel adjustable in steps or continuously
  • Scanning features: Dynamic Focus, Point & Line Scan, 3D Beam
  • Image size: Up to 8,192 x 8,192 pixels, adjustable separately for live and store images; Selectable square and rectangular formats (1:1, 3:4, and 1:2)

Services

variable pressure resolution

Status

free
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