Sputter coater k550x

The K500X is industry standard, digitally-controlled sputter coater, ideally suited for SEM and other coating applications. Designed for sputtering non-oxidising metals gold (Au) fitted as standard. K550X includes a rotating, tilting specimen stage as standard, whilst the K500X comes with a static sample stage. K500X has 165mm diameter chambers and can accommodate a range of specimens and stubs, which, together with pre-selectable parameters and fully-automatic control, gives defined and repeatable film thickness deposition. A routine cycle time for sputter coating SEM samples with conductive coating (5-15nm) of gold (Au) will typically be less than four minutes. K500X are designed to sputter non-oxidising metals (such as gold (Au), platinum (Pt), silver (Ag), palladium (Pd), etc. A gold sputter target is fitted as standard.

• Weight and dimensions: 450mm W x 350mm D x 175mm H, glass work chamber: 165mm Ø x 125mm H. Weight: 24kg (unpacked)
• Work chamber: Borosilicate glass 165mm Ø x 125mm H
• Safety shield: Polycarbonate cylinder
• Target: Disc type, 60mm Ø and 0.1mm thick, bonded onto an aluminium backing plate (gold (Au) fitted as standard)
• Specimen stage: 60mm Ø
• Vacuum gauge range: ATM ­ 1x10-2mbar
• Current range: 0-50mA
• Deposition rate: 0-25nm/minute (depending upon metal type and operating conditions)
• Sputter timer: 0-4 minutes (multiple cycles possible)
• Pre-set needle valve: Control of argon gas supply
• Specimen stage: Six concentric stub holes. K550X: Motordriven rotation and tilt facility 0-900. The K500X has a static stage
• Services: Argon - nominal 5psi
• Vacuum pump: 50L/m or greater (see EK3175). Range: to 102mbar
• Electrical supply: 230V/50Hz (10A max including pump), 116V/60Hz (16A max including pump)
• Supplied with: TK8842 gold (Au) target, pump hose and connectors, operating manual and accessory pack, implosion guard

sputter coating of non-oxidising metals (Au, Pt, Ag, Pd, etc.)