SEM-FIB Tescan Lyra

Research equipment for analysis of morphology, mechanical properties, content and structure of materials.

A fully PC controlled SEM with Schottky field emission cathode in combination with gallium Focused Ion Beam (FIB) column and with Gas Injection System (GIS).

• Accelerating voltage 200 V to 30 kV
• Probe current 2 pA to 200 nA
• Resolution in High Vacuum Mode 1.2 nm at 30 kV, 4.5 nm at 1 kV
• Resolution BSE: 2 nm at 30 kV
• Maximum Field of View 6 mm at WD 9 mm, 17 mm at WD 30 mm
• Electron Optics Working Modes:
• Resolution: High-resolution mode
• Depth: Sets the column up in a mode that enhances depth of focus
• Field: Optimizes the column to provide a large non-distorted field of view
• Ga Liquid Metal Ion Source 0.5 kV to 30 kV
• Probe Current 1 pA to 40 nA
• SEM-FIB angle: 55°
• Chamber Vacuum:
• High Vacuum Mode: < 9x10-3 Pa
• Low Vacuum Mode: 7 – 500 Pa
• Micromanipulator for TEM lamella preparation.
• EDX Oxford X-Max 50 mm2 detector, AZtec software

Applied physics, material science.