Surface Profile Measuring System Veeco „Dektak 150”

Research equipment for analysis of morphology, mechanical properties, content and structure of materials.

• Measurement technique: Stylus profilometry
• Measurement capability: Two-dimensional surface profile measurements
• Sample viewing: 640 x 480-pixel (1/3in.-format) camera, USB;
• fixed magnification: 2.6mm FOV (166X with 17in. monitor);
• manual zoom: variable 0.67 to 4.29mm (644X to 100X with 17in. monitor)
• Stylus force: Low-Inertia Sensor (LIS 3)
• Stylus options: 0.03 to 15mg (N-Lite sensor)
• Sample stage:
  • 12.5μm and 2.5μm
  • Manual X/Y/Θ, 100 x 100mm XY
  • translation, 360° rotation,
  • 150mm (6in.) travel,1μm
  • repeatability, 0.5μm resolution
• Software: Dektak software running under Windows XP, Step Detection software (std.), Stress Measurement software, 3D Vision analysis software.
• Performance
• Scan length range: 55mm (2.16in.)
• Data points per scan: 60,000 maximum
• Max. sample thickness: Up to 100mm (4in.)
• Max. wafer size: 150mm (6in.)
• Step height repeatability: 6Å, 1 sigma on 0.1μm step
• Vertical range: 1mm (0.039in.)
• Vertical resolution: 1Å max. (at 6.55μm range)

Transparent films/photoresist thickness, thin- and thick-film measurements, roughness studies, surface quality and defect review and etc.