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Scanning Electron Microscope with EDS detector

This SEM can be used for high resolution sample observation as well as elemental analysis.

Scanning Electron Microscope with EDS detector

Contacts and Location

Contact 1 Raimonds Meija
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Organisational Unit Institute of Chemical Physics
    University of Latvia

Description

This SEM can be used for high resolution sample observation as well as elemental analysis.

Specification

5 Specification [main functions, parameters] Gun – Cold cathode field emission type Resolution:

  • 1nm (15kV) with working distance 4mm
  • 2nm (1KV) with working distance 1.5nm

HV range – 0.5kV – 30kV Magnification range:

  • Low magnification mode 30x – 2000x
  • High magnification mode 100x – 800000x

Detectors:

  • Two secondary electron (SE) detectors (upper and lower);
  • Backscattered electron detector (BSE)
  • Transmitted electron detector (TE)

EDS detector – 123eV

Services

Has upper and lower secondary electron (SE) detectors for topological measurements /contrast, BSE detector for elemental contrast and TE detector, when observer is ignorant to surface charasteristics. With addition of EDS detector, system provides qualitative and quantitative elemental analysis (up to Be) with spatial resolution 1µm2. 9 Service (that can be provided with this item) Has upper and lower secondary electron (SE) detectors for topological measurements /contrast, BSE detector for elemental contrast and TE detector, when observer is ignorant to surface charasteristics. With addition of EDS detector, system provides qualitative and quantitative elemental analysis (up to Be) with spatial resolution 1µm2 Can be used for in-situ nanomanipulation and electrical measurements (when combined with SmarAct 13D nanomanipulation system).

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