Contacts and Location
Contact 1 | Raimonds Meija |
---|---|
Enquire about this equipment | |
Organisational Unit |
Institute of Chemical Physics University of Latvia |
Description
This EBL equipment can be used to design and fabricate the nanostructures.
Specification
Services
This equipment can be used for the nanopatterning of the flat surfaces with the finest feature size below 50 nm. High spatial alignment accuracy can be provided for the samples with pre-patterned structures.
Manufacturer
RAITH HITACHI
Model
Raith Elphy Quantum, installed on Hitachi S-4800 Field Emission SEM