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Quadrupole mass-spectrometer for process control and diagnostics

Equipment for development of thin films, functional materials and nanostructured materials.

Quadrupole mass-spectrometer for process control and diagnostics

Contacts and Location

Contact 1 Linards Skuja
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Organisational Unit Institute of Solid State Physics
    University of Latvia

Description

Equipment for development of thin films, functional materials and nanostructured materials.

Specification

Portable mass-spectrometer employing electric quadrupole field for ion mass selection. Mass range 1-200 atomic mass units (amu), resolution aprox. 0.5 amu, minimum detectable partial pressure 10-12 Torr, operating pressure range 10-4 to UHV, model Ametek Dycor LC-D.

Services

Control and diagnostics of technological processes or applications making use of vacuum or controlled gas atmosphere. Vacuum leak detection. Surphace cleanness and gas adsorption-desorption measurements, chemical analysis in conjunction with laser ablation.

Funding Source

Other -
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