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High resolution Scanning Electron Microscope (SEM) Verios 5 UC

The Verios 5 XHR SEM offers subnanometer resolution over the full 1 keV to 30 keV energy range with excellent materials contrast. Unprecedented levels of automation and ease-of-use make this performance accessible to users of any experience level.

High resolution Scanning Electron Microscope (SEM) Verios 5 UC

Contacts and Location

Description

High resolution nanomaterial imaging with the UC+ monochromated electron source for sub-nanometer performance from 1-30 kV. High contrast on sensitive materials with excellent performance down to 20 eV landing energy and high-sensitivity in-column and below-the-lens detectors and signal filtering for low-dose operation and optimal contrast selection. Greatly reduced time to nanoscale information for users with any experience level using the Elstar electron column featuring SmartAlign and FLASH technologies. Consistent measurement results with ConstantPower lenses, electrostatic scanning and a choice of two piezoelectric stages. Flexibility for accessories with a large chamber. Unattended SEM operation with Thermo Scientific AutoScript 4 Software, an optional Python-based application programming interface.

Specification

Electron beam resolution 0.6 nm at 30 kV STEM (optional) 0.6 nm at 2-15 kV 0.7 nm at 1 kV 1.0 nm at 500 V Standard detectors ETD, TLD, MD, ICD, beam current measurement, Nav-Cam+, IR-camera Optional detectors Optional detectors | EDS, EBSD, RGB cathodoluminescence, Raman, WDS, and more Stage bias (beam deceleration, optional) Up to -4000 V, included as standard Sample cleaning Integrated plasma cleaner, included as standard Sample manipulation Verios 5 UC 5-axis motorized eucentric stage, with XYR axes piezo driven. XY range 150 x 150 mm2, 70° tilt range. Loading through the door. Verios 5 HP Chamber mounted, ultra-stable 5 axis all piezo motorized stage. XY range 100 x 100 mm2, 70° tilt range. Loading via automated load lock. Chamber 379 mm inside width, 21 ports Software options Thermo Scientific Maps Software for automatic large area acquisition using tiling and stitching; correlative work Thermo Scientific AutoScript 4 Software; a Python-based application programming interface Pattern generation software TopoMaps for image colorization, image analysis and 3D surface reconstruction

Services

High resolution microscope.

Contract title

Augstas izšķirtspējas Skenējošais Elektronu Mikroskops (SEM) Verios 5 UC

Contract short description

Verios 5 XHR SEM piedāvā subnanometra izšķirtspēju visā 1 keV līdz 30 keV enerģijas diapazonā ar lielisku materiālu kontrastu. Bezprecedenta automatizācijas un lietošanas ērtuma līmenis padara šo veiktspēju pieejamu jebkura pieredzes līmeņa lietotājiem.

Contract full description

Elektronu staru kūļa izšķirtspēja 0,6 nm pie 30 kV STEM (pēc izvēles) 0,6 nm pie 2-15 kV 0,7 nm pie 1 kV 1,0 nm pie 500 V Standarta detektori ETD, TLD, MD, ICD, staru kūļa strāvas mērīšana, Nav-Cam+, IR kamera Neobligātie detektori Neobligātie detektori | EDS, EBSD, RGB katodoluminiscence, Raman, WDS un citi Posma nobīde (staru kūļa palēninājums, pēc izvēles) Līdz -4000 V, iekļauts standartā Paraugu tīrīšana Integrēts plazmas tīrīšanas līdzeklis, iekļauts standarta komplektācijā Paraugu manipulācijas Verios 5 UC 5 asu motorizēts eucentrisks posms, ar XYR asīm pjezo vadīts. XY diapazons 150 x 150 mm2, 70° slīpuma diapazons. Iekraušana caur durvīm. Verios 5 ZS Kamerā uzstādīts, īpaši stabils 5 asu viss pjezo motorizēts posms. XY diapazons 100 x 100 mm2, 70° slīpuma diapazons. Iekraušana, izmantojot automatizētu kravas bloķēšanu. Kamera 379 mm iekšējais platums, 21 pieslēgvieta Programmatūras opcijas Thermo Scientific Maps programmatūra automātiskai lielu platību iegūšanai, izmantojot flīzēšanu un izšūšanu; korelatīvais darbs Thermo Scientific AutoScript 4 programmatūra; uz Python balstīta lietojumprogrammu saskarne Modeļu ģenerēšanas programmatūra TopoMaps attēlu krāsošanai, attēlu analīzei un 3D virsmas rekonstrukcijai

Funding Source

EU Structual Funds (ERAF, ESF) -
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