Research equipment for analysis of morphology, mechanical properties, content and structure of materials.
- Measurement technique: Stylus profilometry
- Measurement capability: Two-dimensional surface profile measurements
- Sample viewing: 640 x 480-pixel (1/3in.-format) camera, USB;
- fixed magnification: 2.6mm FOV (166X with 17in. monitor);
- manual zoom: variable 0.67 to 4.29mm (644X to 100X with 17in. monitor)
- Stylus force: Low-Inertia Sensor (LIS 3)
- Stylus options: 0.03 to 15mg (N-Lite sensor)
- Sample stage:
- 12.5μm and 2.5μm
- Manual X/Y/Θ, 100 x 100mm XY
- translation, 360° rotation,
- 150mm (6in.) travel,1μm
- repeatability, 0.5μm resolution
- Software: Dektak software running under Windows XP, Step Detection software (std.), Stress Measurement software, 3D Vision analysis software.
- Performance
- Scan length range: 55mm (2.16in.)
- Data points per scan: 60,000 maximum
- Max. sample thickness: Up to 100mm (4in.)
- Max. wafer size: 150mm (6in.)
- Step height repeatability: 6Å, 1 sigma on 0.1μm step
- Vertical range: 1mm (0.039in.)
- Vertical resolution: 1Å max. (at 6.55μm range)
Transparent films/photoresist thickness, thin- and thick-film measurements, roughness studies, surface quality and defect review and etc.