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Non-Contact, 3D Optical Profiler

Research equipment for analysis of morphology, mechanical properties, content and structure of materials.

Non-Contact, 3D Optical Profiler

Contacts and Location

Contact 1 Aivars Vembris
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Organisational Unit Institute of Solid State Physics
    University of Latvia

Description

Specification

  • Measurement technique: 3D optical interferometer
  • Field of view: from 0.5 to 2 mm
  • Objectives: 5x, 10x and 50x
  • Optical resolution: ≤ 4μm
  • x/y scan rate: ≤ 26μm/sek
  • Sample stage: Motorized 150 mm x/y travel; Manual ±6° tip/tilt
  • Sample maximum size: 89 x 203 x 203 mm
  • Vertical resolution: 0.1nm
  • Vertical scan range: 150μm
  • Focus: Motorized manual and auto focus
  • On-screen live display: 23" TFT monitor with live display
  • Scanning and processing software: ZYGO MetroPro

Services

Non contact films thickness, thin- and thick-film measurements, roughness studies, surface quality and defect review and etc.

Funding Source

Other -
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