The electrons interact with atoms in the sample, producing various signals (secondary electrons, backscattered electrons, X-rays), that can be detected and that contain information about the sample's surface topography and composition.
EDX spectrometer (to identify the qualitative and quantitative composition of the specimen surface):
- Si(Li) LN2 detector
- 10mm2 INCA SATW window
- Detection from Be to Pu
- Detector resolution guaranteed at 2,500cps provides reliable and accurate results over entire spectral range at typical microscope operating conditions: at C Kα 66eV or better, at F Kα 70eV or better, at Mn Kα 133eV or better
- Stability guaranteed from 1,000 to 100,000 cps – peak shift and resolution change <1 eV
- Reliable AutoID for element Identification
- Interaction area ≥1mkm
- Sensitivity of 1 Wt% for light elements and 0.1 Wt % for heavier elements
Electron optics working modes
- High vacuum mode: Resolution, Depth, Field, Wide Field, Rocking Beam
- Low vacuum mode: Resolution, Depth
- Magnification: 4x to 1,000,000x in Continual Wide Field / Resolution Mode
- Accelerating voltage: 500 V to 30 kV
- Electron gun: High brightness Schottky emitter
- Probe current: 2 pA to 20 nA
- Scanning speed: From 200 ns to 10 ms per pixel adjustable in steps or continuously
- Scanning features: Dynamic Focus, Point & Line Scan, 3D Beam
- Image size: Up to 8,192 x 8,192 pixels, adjustable separately for live and store images; Selectable square and rectangular formats (1:1, 3:4, and 1:2)
variable pressure resolution
free